MRC:
A recording of the physical,functional,and performance characteristics for an item of supply.TEXT
General Description:
Kfully automated w/multiple process and operating modes; e-beam guns w/switching power supply, computer control, automatic crucible and shutter; thermal evaporation source w/shutter; water-cooled stainless steel chamber; quartz crystal controller; ion source; heavy-duty stainless steel evaproant shields; diffusion pump or cryopump; meissner trap w/mechanical chiller; automatic pressure control; planetary (dual rotation) substrate fixture of single rotation fixture
